Microbeam X-ray Fluorescence is a revolutionary new approach to film thickness determination. Using a focused x-ray beam energy source, Microbeam XRF measures the thickness and composition of up to six layers of deposited metals simultaneously, from angstrom to micron thickness ranges.

Configurable microbeam XRF film thickness and composition measuring tool

Thermo's entry-level Microbeam XRF platform

Basic Microbeam XRF with optical collimation option

Microbeam XRF for RoHS and plating thickness measurements



Superior resolution and sensitivity, including light element sensitivity